Rating is available when the video has been rented.
This feature is not available right now. Please try again later.
Published on Oct 24, 2013
This animation illustrates the chemistry of a wet thermal oxidation process that is used to grow silicon dioxide (SiO2) on a silicon (Si) wafer. In a wet oxidation process, water vapor (H2O) interacts with the silicon atoms at the SiO2-Si interface to form SiO2. This process is discussed in more detail in the Deposition Overview for MEMS Learning Module which can be viewed and downloaded at http://scme-nm.org/index.php?option=c... . This presentation is presented by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (http://scme-nm.org).