 This new technology uses femtosecond UV lasers to precisely etch quartz wafers with the CIU coating, allowing for the creation of piezo electrically actuated resonator beams. The laser-induced chemical etching prevents the formation of defects and allows for high geometric design flexibility. Additionally, the surface roughness and wall profiles of the fabricated quartz structures are significantly improved compared to previous efforts. This article was authored by John Lindham, Nita Melek, Eagle Sakhaev and others.