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Published on May 25, 2011
The Oerlikon Solaris is a high speed sputtering system designed for front- and back side coating of crystalline silicon solar cells. The Multi layer capability allows passivation and "silane free" SiN-AR (Anti Reflective) coating on the front side with the freedom to select optical criterias (like refractive indices, etc.) of individual layers as well as passivation and metal layer on the back side.