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Introduction to Sensors - Macro and Micro-size

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Published on Mar 11, 2013

What is a sensor? How do sensors work? What type of sensors are used in Microtechnology? Learn the answer to these questions and more.
This presentation is presented by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (http://scme-nm.org).

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  1. 3

    An Activity on Miller Index Notation

  2. 4

    Crystal Silicon Ingot Formation

  3. 5

    Breaking Silicon Wafers Activity - Demo

  4. 6

    Microcantilevers as Biosensors

  5. 7

    Cantilevers and Resonant Frequency

  6. 8

    An Introduction to DNA Microarrays

  7. 9

    DNA Microarray Fabrication

  8. 10

    How Does a DNA Microarray Work?

  9. 11

    Wet Oxidation Process

  10. 12

    Dry Thermal Oxidation Process

  11. 13

    Wet vs. Dry Oxidation Processes

  12. 14

    History of MEMS - An Introduction

  13. 15

    Weights and Measures Part III

  14. 16

    Weights and Measures Part II

  15. 17

    Weights and Measures Part I

  16. 18

    The Workings of the Retinal Prosthesis

  17. 19

    Silicon Crystal Origami

  18. 20

    MEMS Applications Overview

  19. 21

    Comparison of Scale: Macro, Micro, Nano

  20. 22

    Introduction To Transducers - Macro and Micro-size

  21. Introduction to Sensors - Macro and Micro-size

  22. 24

    Introduction to Actuators - Macro and Micro-size

  23. 25

    Etch Processes for Microsystems - Part I

  24. 26

    Etch Processes for Microsystems Fabrication - Part II

  25. 27

    Deposition Overview - Part I

  26. 28

    Deposition Overview - Part II

  27. 29

    Photolithography Overview for MEMS

  28. 30

    LIGA_Micromachining

  29. 31

    Surface Micromachining Overview

  30. 32

    Bulk Micromachining Overview

  31. 33

    MEMS Pressure Sensor Fabrication

  32. 34

    DNA Microarray

  33. 35

    DNA Hybridization

  34. 36

    Hydrophobic MP4.mov

  35. 37

    LIGA Micromachining Process Overview

  36. 38

    Ps_backside_etch_3loops.mov

  37. 39

    MEMS Pressure Sensor Operation

  38. 40

    (100) Crystal Plane of Silicon

  39. 41

    MEMS Cantilevers - Sacrificial Layer Removal

  40. 42

    MEMS Pressure Sensor Backside Etch

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