 The study examined the room temperature creep behavior of lithium-tantylate single crystals using nanoindentation technology. Three types of spherical tips with varying radii were used to measure the creep deformation at both elastic and plastic regions. It was found that the creep displacement and rate were nearly linearly increased with increasing holding depth, and independent of tip size. This suggests that the simultaneous increase in holding strain and deformation volume beneath the indenter is responsible for the observed creep behavior. Additionally, it was observed that the creep deformation, strain and strain rate are more pronounced under smaller spherical tips. Furthermore, the potential room temperature creep mechanism of lithium-tantylate under high shear compression stress was discussed. This article was authored by Wei Heng, Xin Wei Huang, Min Lu, and others.