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Etch Processes for Microsystems - Part I

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Published on Feb 7, 2013

In this presentation we discuss the types of etch processes used to fabrication micro-sized devices with an emphasis on the wet etch processes. Part II of this series covers the dry etch processes. This presentation is presented by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (http://scme-nm.org).

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