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Published on Sep 4, 2012
This is a brief overview of the deposition processes used to fabricate micro-sized devices. This presentation covers "what is deposition?", spin-in deposition, and thermal oxidation. Part II covers CVD, PVD, and electrodeposition. This presentation is presented by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (http://scme-nm.org).