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Published on Sep 7, 2011
The Airborne Particle Sensor (APS) can be moved through semiconductor process equipment and automation material handling systems to monitor airborne particles in the systems. Its wafer-like shape is compatible with your existing automation and its wireless communication provides real-time data to speed tool qualification and release to production. Particle data can be recorded so you can compare past to present as well as one tool to another to validate, maintenance procedure qualities and potential yield issues.