 M-I-C-R-O-F-A-B-R-I-C-A-D-I-O-N, microfabrication is the process of fabricating miniature structures of micrometer scales and smaller. Historically, the earliest microfabrication processes were used for integrated circuit fabrication, also known as SEMIL conductor manufacturing versus SEMIL conductor device fabrication. In the last two decades, micro-electro-mechanical systems MEMS micro-systems European usage micro-makens Japanese terminology and their sub-fields, micro-fluidics flash lab on A-Chip. Optical MEMS also called M-O-E-Ms are AF MEMS, POWER MEMS, BIOMEMS and their extension into nano-scale. For example, MEMS for nano-electro-mechanical systems have re-used, adapted or extended microfabrication methods. Flat panel displays and solar cells are also using similar techniques. Miniturization of various devices presents challenges in many areas of science and engineering, physics, chemistry, material science, computer science, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research. The major concepts and principles of microfabrication are microlethography, doting, thin films, polishing, bonding, and polishing.