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Etch Processes for Microsystems Fabrication - Part II

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Published on Feb 7, 2013

Etch processes Part II covers the basics of dry etch processes and describes several applications of dry etching for microsystems fabrication. Part I of etch processes covers the types of etch and the wet etch processes. This presentation is presented by the Southwest Center for Microsystems Education (SCME). Supporting materials can be downloaded from the SCME website (http://scme-nm.org).

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