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Published on Jul 29, 2009
UCI MicroSystems Laboratory (http://mems.eng.uci.edu/) are focused on development of MEMS (Micro-Electro-Mechanical Systems) sensors and actuators based on novel design concepts. Current research projects on Conventional and 3D MEMS Inertial Sensors (gyroscopes and accelerometers) involve design, modeling, fabrication, characterization, control system and sensing electronics design, and integration of advanced sensor systems.
In this video we demonstrate comparative analysis of FE modeling and Polytec Scanning Vibrometer MSA-500 experimental measurements.