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Photolithography Overview for MEMS

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Published on Aug 6, 2012

This is a short overview of the photolithography processes used to fabricate micro-sized devices. This presentation was produced by the Southwest Center for Microsystems Education (SCME). A supporting Photolithography Overview Learning Module can be downloaded from SCME's website (http://scme-nm.org), Educational Materials.

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  1. 9

    DNA Microarray Fabrication

  2. 10

    How Does a DNA Microarray Work?

  3. 11

    Wet Oxidation Process

  4. 12

    Dry Thermal Oxidation Process

  5. 13

    Wet vs. Dry Oxidation Processes

  6. 14

    History of MEMS - An Introduction

  7. 15

    Weights and Measures Part III

  8. 16

    Weights and Measures Part II

  9. 17

    Weights and Measures Part I

  10. 18

    The Workings of the Retinal Prosthesis

  11. 19

    Silicon Crystal Origami

  12. 20

    MEMS Applications Overview

  13. 21

    Comparison of Scale: Macro, Micro, Nano

  14. 22

    Introduction To Transducers - Macro and Micro-size

  15. 23

    Introduction to Sensors - Macro and Micro-size

  16. 24

    Introduction to Actuators - Macro and Micro-size

  17. 25

    Etch Processes for Microsystems - Part I

  18. 26

    Etch Processes for Microsystems Fabrication - Part II

  19. 27

    Deposition Overview - Part I

  20. 28

    Deposition Overview - Part II

  21. Photolithography Overview for MEMS

  22. 30

    LIGA_Micromachining

  23. 31

    Surface Micromachining Overview

  24. 32

    Bulk Micromachining Overview

  25. 33

    MEMS Pressure Sensor Fabrication

  26. 34

    DNA Microarray

  27. 35

    DNA Hybridization

  28. 36

    Hydrophobic MP4.mov

  29. 37

    LIGA Micromachining Process Overview

  30. 38

    Ps_backside_etch_3loops.mov

  31. 39

    MEMS Pressure Sensor Operation

  32. 40

    (100) Crystal Plane of Silicon

  33. 41

    MEMS Cantilevers - Sacrificial Layer Removal

  34. 42

    MEMS Pressure Sensor Backside Etch

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