 The growing interest in depositing organic and hybrid inorganic organic materials using molecular layer deposition, MLD, and atomic layer deposition, ALD, techniques, which can produce high quality thin films and coatings with thickness and composition control on the molecular scale, is currently being explored. By combining these two techniques, fundamentally new types of inorganic organic hybrid materials can be produced, and novel multi-layer and nanostructure architectures can be fabricated using innovative nanotemplates or post-deposition treatments to selectively decompose parts of the structure. These layer-engineered and or nanostructured hybrid materials with exciting combinations of functional properties hold great promise for high-end technological applications. This article was authored by Pia Sundberg and Merritt Carpennan.