Ultra fast silicon oxide deposition by AcXys atmospheric plasma technology. Possible applications in optical design, electrical insulation, barrier layers.
What kind of precursors (HMDS) or TMDS etc... anyway I would like to know if the coatings are so defect-free that a leakcurrent of 1nA/10mm2 with 120nm of insulation coating can be obtained!..
Excellent: 5*
I would like to know the
homogeniety of the coating?
Thickness of the deposition?
What kind of precursors (HMDS) or TMDS etc... anyway I would like to know if the coatings are so defect-free that a leakcurrent of 1nA/10mm2 with 120nm of insulation coating can be obtained!..
otherwise welldone.
femtophysiker 2 years ago