FRT - MicroProf 200 TTV MHU - Automated Non-Contact Wafer Metrology Tool

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Uploaded by on Jan 5, 2011

The new FRT MHU is a multi-cassette wafer metrology tool for the fully automated inspection of wafers. The tool accepts wafers from 2" up to 8" in diameter and has been designed from ground-up to accommodate the latest metrology workflow and standard requirements in the wafer fab. All components harmonize perfectly to assure superior uptime, throughput and precision.

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