Demonstrating open-loop actuation of WaferStage

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Uploaded by on Jun 4, 2010

100 mm silicon wafer, floating on air and actuated by directional airflow underneath it. Actuation in all 3 in-plane degrees of freedom is shown. The out-of-plane DoFs can also be actuated. Result of the 'Contactless Positioning' project at Delft University of Technology, Mechatronic System Design group.

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Science & Technology

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