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MIT MicroHexFlex without Input Shaping or HyperBit

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Uploaded by on May 15, 2008

MIT's novel microscopic MEMS hexapod (six-degree-of-freedom positioner) in fast square wave actuation (metrology in velocity regime) without Input Shaping(R) for vibration cancellation or HyperBit(TM) for DAC resolution enhancement. Compare to the video at http://www.youtube.com/watch?v=UxJH7_diSDk which shows the dramatic gains from these technologies.

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Science & Technology

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