Sputtering System
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SILICON WAFER PRODUCTION PROCESSby wanafrayuri84,865 views
Hello, I am a student of electronic engineer and i am designing a controller PID by software to get control of the temperature of the substrate holder into a chamber similar to your chamber. Do you know some kind of transfer function could be good for the plant?, because at the moment i am doing tests in a little furnace, where my transfer function is = 0.66/(120S +1)...I will control the temperature by a resistor near the substrate holder, do you know other way?...Thank you!
calchav77 5 months ago
is this a Mitsubishi factory ?
Adhiraj123 4 years ago