sputtering: a process animation

Sputtering is a technique used to coat surfaces to improve mechanical resistance, or biocompatibility. Its caracterized by introducing argon, an inert gas, with very low pressure on a vacuum chamber. By applying an electric field, the gas ionizes, becomes plasma (4th state of the matter) and by kinetic energy transfer it ejects atoms of the target (the material we use to make the coating) which move torwards the substrate (what we wish to coat). It's a process which allows to do coatings with structure/materials which are usually non-miscible. Also allows to get metastable phases.

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[100805004]

thanks!

[m2omara]

The moving ions is the Ar+ in the most cases, and its starts to collide with target after applying (-ve voltage) leads atoms to be ejected from the target to the substrate...thanks a lot