E-Beam Lithography, Part 3

Loading...

Sign in or sign up now!
Alert icon
Upgrade to the latest Flash Player for improved playback performance. Upgrade now or more info.
2,628
Loading...
Alert icon
Sign in or sign up now!
Alert icon

Uploaded by on Jun 3, 2010

E-beam lithography is the process of directing an electron beam across a resist layer and thereby creating a pattern that can be etched. Structures of 20nm can be produced. This is the technique that is often used to create nano scale waveguides and microring resonators. One type uses an scanning electron microscope equipped with special beam control software. The other far more expensive method is a dedicated e-beam facility that is able to etch structures directly.
This video is part 3 of a 3-part series.

More information on CMDITR's wiki:
http://depts.washington.edu/cmditr/mediawiki/index.php?title=E-beam_Lithography

  • likes, 0 dislikes

Link to this comment:

Share to:
see all

All Comments (0)

Sign In or Sign Up now to post a comment!
Loading...

Alert icon
0 / 00Unsaved Playlist Return to active list
    1. Your queue is empty. Add videos to your queue using this button:
      or sign in to load a different list.
    Loading...Loading...Saving...
    • Clear all videos from this list
    • Learn more