The video demo above shows the analog outputs from SPPE-1000 heads before the phase demodulation process. The sinusoidal signal on top represents the MEMS oscillation signal, which is used as a reference signal for the phase demodulation. The two other signals below show a modulated signal from internal reference grating and the signal from the external grating scale respectively.
By applying minute force to the head body, one can see the waveform of the SPPE signal, which corresponds to the relative position between the head and the external grating scale, changes with high sensitivity. Our patented method then extracts the phase (therefore the position information) down to 7.6pm with excellent signal-to-noise ratio.
http://www.nanowave.com/Ps_SPPE.htm
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