Metrologix - KLA Tencor CD SEM seen in the SCI Channel

Shown in the program "Dark Secret of Hendrik Schon" of the Science channel, first aired on September 2008.
Machine seen at 15 - 21 seconds. It was the highest throughput CD SEM in the world.
It was installed in all mayor fabs of the US and elsewhere, at a price of over $1M.
Video clip © SCI Channel - posted for educational purposes only.

Vote for Mr. Guillermo Toro-Lira, creator of this machine, to the contest ORGULLO PERUANO 2011 (Peruvian Pride 2011) here: http://tinyurl.com/5tufy89

Category:

Science & Technology

Tags:

• Peru
• Metrologix
• KLA
• TENCOR
• CD
• SEM
• Lithography
• SCI
• science
• channel
• dark
• secret
• hendrik
• schon

[gtls]

That one was the original Metrologix machine. KLA removed the front panel monitor later.

[Armstrongtube1976]

8XXX series. But have never seen a version with additional monitor mounted on front panel.