An Untethered, Globally Controllable MEMS Micro-robot

We present a steerable, electrostatic, untethered, MEMS micro-robot, with dimensions of 60 µm by 250 µm by 10 µm. This micro-robot is 1 to 2 orders of magnitude smaller in size than previous micro-robotic systems. The device consists of a curved, cantilevered steering arm, mounted on an untethered scratch drive actuator. These two components are fabricated monolithically from the same sheet of conductive polysilicon, and receive a common power and control signal through a capacitive coupling with an underlying electrical grid.

More information can be found at:
B. R. Donald, C. Levey, C. McGray, I, Paprotny, and D. Rus. "An Untethered, Electrostatic, Globally-Controllable MEMS Micro-Robot" Journal of Microelectromechanical Systems, 2006; 15(1):1-15.

Category:

Entertainment

Tags:

• micro-robot
• mems
• mems-robot
• scratch-drive

[jiminiflix]

so how big is it?

[igorpapa]

250x60x10 micros, you could place it on top of the slice of a human hair

[1NX9]

@igorpapa

How thick is a human hair?

[4763843]

@4763843 if you joined the marines

xD

[Stouk618]

@4763843 yay. Nanosuits. Glad i'm joining the Army at that time :)

[4763843]

@igorpapa so after 10~20 years max we can have nanaites? and make a nano suit?

[Aisytenjou]

wow tetris

[jy00912345]

geil

[oveaxe]

Nice Igor. Long way sice the first robot you made in school. I am proud my friend..

[Blacksun1942]

Amazing....