Varian Viista HC Ion Implanter Chamber Door PM

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Uploaded by on Feb 20, 2009

Foamtec Vacuum Chamber PM Products reduce Tool downtime and particles while eliminating the need for Scotchbrite and H2O2 on Varian Ion Implant PM's. For more info, please visit http://www.foamtecintlwcc.com/industries/semiconductor-manufacturing/ion-impl...

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  • But what a great technique for all those heavy dep areas you can't remove from the chamber and take to a sink... that ergo handle has saved me from 6-8hr scrubs I've had to do with scotchbrite

  • Better, cheaper and faster to just place the entire plate in a DI water sink and scrub away with a nylon brush or scotch brite. Then wipedown with IPA.

  • Good video, don't know what the purpose of the splash goggles are though since the fellow never put them over his eyes. Maybe they are protecting his forehead? LOL

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