E-Beam Lithography, Part 1

E-beam lithography is the process of directing an electron beam across a resist layer and thereby creating a pattern that can be etched. Structures of 20nm can be produced. This is the technique that is often used to create nano scale waveguides and microring resonators. One type uses an scanning electron microscope equipped with special beam control software. The other far more expensive method is a dedicated e-beam facility that is able to etch structures directly.
This video is part 1 of a 3-part series.

More information on CMDITR's wiki:
http://depts.washington.edu/cmditr/mediawiki/index.php?title=E-beam_Lithography

Category:

Science & Technology

Tags:

• E-Beam Lithography
• University of Washington
• Scott Braswell
• Photonics

[PrometheanRunGood]

the colours from the thickness change is neat.

[X4K3R]

Where are your safety glasses?

[krystophny]

Thanks a lot! I'm studying for an exam on Nanostructures today and your video made the lithography chapter a lot more fun :)

[mrmrsmoron]

this is realli good vdeo series, to watch this after having a little idea lithograogy really helps. Infact if you have more vdoes of other processes please put them up.