Vector Extreme Video

Novellus Systems has introduced the VECTOR Extreme' plasma enhanced chemical vapor deposition (PECVD) system that is one of the first systems designed to specifically tackle the high-throughput/short cycle time requirements of Mega' fabs that have production capacity in excess of 100,000wspm. The VECTOR Extreme' has a claimed throughput of up to 250 wafers per hour with the use of 12 deposition stations that also achieve cycle-time reductions of more than 40 percent as compared to other systems available in the market, according to the company.

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Education

Tags:

• Novellus systems
• vector extreme
• PECVD
• fabrication tools
• silicon
• wafer
• karthik kulkarni
• kartik kulkarni

[NovellusC1]

precise system.