TOF-SIMS Principle (3D)

For TOF-SIMS analysis, a solid sample surface is bombarded with a pulsed primary ion beam. Both atomic and molecular ions are emitted from the outer layers of the surface and extracted. Their mass is measured by their time of flight to the detector. This analysis cycle is repeated at high frequency to generate the complete mass spectrum with high dynamic range.

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Science & Technology

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• tofsims
• tof-sims
• surface
• analysis
• spectrometry
• sample
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