STRASBAUGH 6DE-DC Overarm Polishing Machine

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Uploaded by on May 29, 2011

Strasbaugh's 6DE-DC1 Overarm Polisher with 12" process table and 3" carrier. Reciculating Slurry System and pan removed video clarity. Process is set up is R&D mode, CMP "annular" polishing style, with 35 mm square wafer being polished face down on an IC urethane polishing pad. The wafer is wax-mounted, or thermal tape mounted on to the precision flat stainless steel carrier. The process table is also precision flat lapped stainless, flat to 0.0001". For more info contact: www.strasbaugh.com

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