This PE-200 Benchtop Plasma Etch System is fully automated and is capable of processing multiple parts up to 13"x13".
This particular system is designed for solar cell edge isolation. There are only two electrodes but the solar panels are stacked in between to process multiple panels simultaneously. Since this process can be rather long, Plasma Etch's patented temperature control system is provided.
The standard PE200 is offered with 3 electrode/shelves of 3" spacing to place parts. General applications include cleaning and surface modification prior to bonding applications. An RIE configuration is offered for high rate anisotropic directional etching.
VISIT THE PLASMA ETCH WEBSITE FOR MORE INFO:
www.plasmaetch.com
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