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Hollow Cathode Magnetron Part 1

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Uploaded by on Aug 24, 2009

http://www.surfacetreatments.it/
The research item consisted in enhancing the ionization efficiency of a plasma confined in a circular magnetron discharge on the top of the target. Several approaches are possible for the plasma densification: from a special design of the magnetic confinement up to the inductive coupling of plasma with microwaves. We have investigated the possibility to booster a planar magnetron with a linear hollow cathode, acheving the result of an increase of the plasma ionization index, an increase of the sputtering rate, and the opening the plasma cone.
This and others research items you will be able to meet, if you will be selected for the new edition of the MASTER in SURFACE TREATMENTS FOR INDUSTRIAL APPLICATIONS at Padua University (ITALY)
http://www.surfacetreatments.it/

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  • Complimenti !!!

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