Super Large and High Precision XY Gantry Stage : DigInfo

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NTN will begin selling its new precision positioning device, the　"Super Large and High Precision XY Gantry Stage", in May of this year. The new table is compatible with 10th generation liquid crystal glass substrates, which are currently the largest size.

Due to road transportation related laws, delivery of completely assembled positioning equipment that attaches 10th generation size LCD glass substrates was impossible. Therefore, the soon to be available " Super Large and High Precision XY Gantry Stage " was designed with a new separation and joint structure and features an adjustment mechanism at the joints. After the strokes of existing products are increased at the local site, restoration work can be easily done, and even after being reassembled, the new table provides high precision positioning. The entire installation process can be done in roughly 48 hours, in a relatively short amount of time.

The maximum traveling speed of the gantry stage as a precision positioning device is 1500mm/sec, the positioning accuracy is 30µm or less, and the repetitive positioning accuracy is ±0.5µm. The sales price is 20 million yen per unit.

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