AST 210/EE 213 - Lecture 28: EUV lithography
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Uploaded by UCBerkeley on Aug 21, 2007
Applied Science & Technology 210 / Electrical Engineering 213: Soft X-Rays and Extreme Ultraviolet Radiation
Lecture 28: EUV lithography
http://www.coe.berkeley.edu/AST/sxreuv/
Professor David T. Attwood, Electrical Engineering Professor in Residence, Professor Attwood's research interests include short wavelength electromagnetics, soft x-ray microscopy, coherence, and EUV lithography.
[courses] [ee213] [fall2005]
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@SJCJoosten ya think?
wschluch 5 months ago
It seems like the professor was right in saying that 2009 for EUV is too optimistic. Intell has announced that EUV will not be used for 22nm lithography in 2011.
SJCJoosten 3 years ago