YieldStar: A steady stream of data to optimize chip manufacturing

Chips continue to get faster and smaller -- and more difficult to manufacture. ASML's Holistic Lithography products help chip makers to squeeze every bit of performance out of their lithography equipment. An important part of the Holistic Lithography package is YieldStar, a metrology tool that gathers the data to maximize the performance of a lithography system -- which in turn allows manufacturers to produce more advanced chips. YieldStar works fast and with high accuracy because it uses an advanced technology called scatterometry.

Category:

Science & Technology

Tags:

• ASML
• chip
• making
• yield
• lithography
• scatterometry
• semiconductor
• manufacturing