Sustainable CMP

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Uploaded by on Jul 30, 2009

Confluense's Pad Surface Manager (PSM) transforms the utilization efficiency of CMP processes to deliver dramatic cost of ownership savings. The in-situ pad cleaning system constantly removes consumed materials providing: 1) true polish tribology control, 2) in-situ removal rate and endpoint sensing, and 3) intelligent effluent handling, ALL while elimating defect sources, and reducing waste.

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