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Lecture - 28 Etching of Si,Sio2,SiN and other materials

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Uploaded by on Jan 12, 2009

Lecture Series on VLSI Design by Dr.Nandita Dasgupta, Department of Electrical Engineering, IIT Madras. For more details on NPTEL visit http://nptel.iitm.ac.in

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  • I have question you didn't explaine DRIE. I would like to know what type of mask can be used in DRIE for etching the Si. I know I can use photoresist but how about SiO2?

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