Lecture Series on VLSI Design by Dr.Nandita Dasgupta, Department of Electrical Engineering, IIT Madras. For more details on NPTEL visit http://nptel.iitm.ac.in
I have question you didn't explaine DRIE. I would like to know what type of mask can be used in DRIE for etching the Si. I know I can use photoresist but how about SiO2?
I have question you didn't explaine DRIE. I would like to know what type of mask can be used in DRIE for etching the Si. I know I can use photoresist but how about SiO2?
sonia0583 11 months ago