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WaferStage positioning in closed loop control

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Uploaded by on Jun 4, 2010

100 mm silicon wafer, positioned by airflow underneath it. The wafer is floating completely contactless and is controlled by directional airflow underneath. Control of the rotation still needs some improvement. Result of the 'Contactless Positioning' project at Delft University of Technology, Mechatronic System Design group.

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Science & Technology

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  • Awesome. Why is it on a circuit board though? Is it for controlling the airflow?

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