2010-01-19 The first comb-drive actuator experiment in Thailand (Winai Wanburee SUT-SLRI).avi
Loading...
Uploaded by nemsdaddy on Feb 18, 2010
This video shows the first micro comb-drive actuator experiment in Thailand performed on Tuesday 19 th January 2010. This electrostatically driven micro comb-drive actuator had a suspended rotor comb with 19 fingers each of which was 30 microns in width. The stator comb with same dimensions was anchored to the substrate. The main structures of both rotor and stator combs were made of 300 micron-high SU-8 polymer followed by metal coating by sputtering technique. The patterning of this actuator was done by synchrotron x-ray lithography at micromachining lab, the Synchrotron Light Research Institute, Thailand by Winai Wanburee, a graduate student from the Suranaree University of Technology (Ph.D. program in Electrical Engineering). In this first driving experiment, DC pulses of 1 Hz with various amplitudes were fed into the rotor comb while the stator comb was grounded. This experiment showed an important milestone for MEMS community in Thailand.
For more information please contact Dr.Nimit Chomnawang ,
Web site: http://sites.google.com/site/sutmems/ Email: sut.mems@gmail.com
Blog: http://thailandmems.blogspot.com
0:59
MEMS-based clamp with a passive hold function for precision position retaining of micro manipulatorsby danniscarrera3,203 views- 1:12
Larger MEMS Micromirrorsby skske1,677 views
- 0:56
MEMS devicesby cptmoe883,737 views
- 1:00
Piezo Glassby Billmund36,715 views
- 1:24
2009-11-07 The first micro motor experiment in Thailand (Pittaya Deekla SUT-SLRI)by nemsdaddy4,673 views
- 0:57
Firgelli L12 Mini Linear Actuator Demonstrationby trossenrobotics29,028 views
- 3:35
HepcoMotion PSD 120 Linear Actuatorby HepcoMotion8,976 views
- 0:22
2009-01-29 Operation of acceleration sensor/switch testing apparatusby nemsdaddy428 views
- 1:57
MS 10-100™: Maskless Lithography Toolby BioTray779 views
- 0:56
Micro Robotby mahiarhamedi1,060 views
- 4 videosMEMS
- 0:30
Micro actuator for fiberby bghiorso3,958 views
- 3:39
mems_heatuator.wmvby rm010986696 views
- 0:35
Dielectric elastomer minimum energy structure ringby ruffiandx1,462 views
- 9:49
MEMS+ Demo and Presentation PART I: Innovator, a 3-D MEMS CAD environment for MEMS+IC designby CoventorEngineering5,811 views
- 1:33
Electrostatic Motorby brazilero200823,194 views
- 2:05
Electrostatic Rotary Stepper Micromotorby cyamahat362 views
- 1:21
Rotor & Stator Positions on Turbineby SeanyK047,597 views
- 8:59
Introduction to MEMS "Micro-Electro-Mechanical System"by ElectronDZ24,691 views
- 5:45
MicroFlight episode 5 - More Install Magnetic Actuatorsby plantraco104,086 views
Thanks for an excellent depiction of how a comb drive works. Best of luck to you.
swallison50 1 year ago