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Measure 3-D Dynamics and Topography on Microstructure by Polytec GmbH, Polytec Inc.

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Uploaded by on Feb 25, 2009

Inspired by the growing variety of Micro-Electro-Mechanical-Systems (MEMS), Polytec presents a new line of microscope systems for measurements of MEMS dynamics and topography.

The MSA-500 Micro System Analyzer is a powerful new all-in-one measurement workstation for precise 3-D dynamic characterization of MEMS and MOEMS microstructures. * Characterize out-of-plane vibrations by Scanning Laser-Doppler Vibrometry * Measure in-plane motion and vibration by Stroboscopic Video Microscopy * Determine surface topography by White Light Interferometry * Test wafers and individual die by combining Polytecs MSA-500 with a MEMS probe station

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