@MrMabatio You can't import CAD into AutoScript. I am using a program called NPGS. It is an e-beam lithography program that I use to drive the ion column scan coils externally. It is far better than anything FEI offer for this more complex patterning.
@MrMabatio You can't import CAD into AutoScript. I am using a program called NPGS. It is an e-beam lithography program that I use to drive the ion column scan coils externally. It is far better than anything FEI offer for this more complex patterning.
Zumpie65 1 month ago
Hi =)
How Can u do this pattern?, what kind of software you used.
I don't know how to use very well the AutoScript..
tks
MrMabatio 2 months ago