Automated Assembly of Hingeless 90 Degree Out-of-plane MEMS
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Uploaded by chotsang on Nov 3, 2006
This video shows the first documented automated assembly of a single structural layer MEMS structure which only requires the use of a automated prober or automated wirebonder. The sizes for which this technique has been applied range from a 50 micron device up to a 5000 micron device. The technique has also been verified to work with SU-8, Polysilicon, Single Crystal Silicon, Polyimide, Polymethylglutarimide and Polymethylmethacrylate. This technology was developed at Simon Fraser University. www.sfu.ca/immr/pmp/
Full Paper:
http://www.iop.org/EJ/abstract/0960-1317/17/7/014
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whats dimentions of chip?
AVKtt 2 years ago
what is the song ???
sofunkun 3 years ago
Pure gold, nanowaves travel these micro
structures @ 4.8 - 994.2 yotahertz.
The one in this video is not gold though.
WDX7770243546 4 years ago
mems kinda creepy, I like it.
WDX7770243546 4 years ago
There are allready known methods for this. Are there any advantages of this?
Roninist 5 years ago
Got any that show the machines in action?
grimsooth 5 years ago