Fries Research & Technology introduces a custom high precision metrology system consisting of a 200 x 200 mm stage a high resolution vision system with pattern recognition and a chromatic point sensor for the investigation of a wafer's surface.
The system has an additional ink marking system, that marks defect sections on the wafer.
what machine is this one? I used KLA/Tencor as sufscan to inspect wafers for def. and particles.
TzzX78 1 year ago