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FRT - Wafer Inspection with marking system

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Uploaded by on Oct 19, 2007

Fries Research & Technology introduces a custom high precision metrology system consisting of a 200 x 200 mm stage a high resolution vision system with pattern recognition and a chromatic point sensor for the investigation of a wafer's surface.

The system has an additional ink marking system, that marks defect sections on the wafer.

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  • what machine is this one? I used KLA/Tencor as sufscan to inspect wafers for def. and particles.

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