Sicera Cryopump - Sumitomo Heavy Industries : DigInfo

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A cryopump is a capture-type vacuum pump which condenses gases and vapors at extremely low temperatures and removes them from the environment. They are used in situations such as semiconductor and flat-panel manufacturing facilities and the electro-optics industry, where a regular pump could contaminate the system. Sumitomo Heavy Industries, a recognized innovator of cryopumps for high and ultra high vacuum applications, have released the Sicera cryopump, their latest evolution in cryopump technology, which began with its invention in the 1970's. The Sicera can pump 4,000 liters of water, 1,500 liters of air or 2,200 liters of hydrogen per second, and has a gas capacity for hydrogen of 12 liters. Four to seven pumps can be driven by only one compressor, reducing power consumption to 0.9 kW per pump, which is up to 60% less than competing systems. The Sicera can consistently maintain a high vacuum rate at a stable level for use in a variety of specialized environments and the fully-automated regeneration time of this pump is only 2 hours.

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• vacuum
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• cryogenic
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• FPD
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