The MEI Evolution series semiconductor and MEMs wet benches are in-line, configurable, automated, modular, linear batch immersion wet process systems made for high throughput at a low cost. They are designed for dry in and dry out batch wafer processing of multiple lots of wafers from 100mm to 300mm.
Custom configurations combine SECS/GEM interface capabilities, multi step processing, cascade or quick dump rinsing with optional chemical injections,
maringoni drying and linear robotic transfer capabilities into a system that is tailored for your specific process needs. Ultrasonic and Megasonic tanks and baths are available.
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