Spring Constant Measurement of RF MEMS Switch Beam
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Very good. do u have more videos on mems particularly i am interested in rf resonators, switches, phase shifters in 12-18 GHz range.
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If the Spring constant of the dektak stylus is not smaller than that of your device, the measurement will not tell you alot about the real stiffnes value of your device.
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I agree. Fortunately for the measurement, fixed-fixed beam RF MEMS components are blessed with residual stress, making the beams stiff.
vcaeken 4 years ago