SetPAC - Zero Drift Actuator

Besides space applications, there is a growing need to perform processes and experiments in a vacuum environment in the front-end of research and manufacturing industries.

For all of these application fields we developed an UHV-compatible actuator, which is characterised by its relatively large stroke, high resolution, high stiffness and un-powered position locking.

Features:
- 3 DOF planar actuator
- Dimensions:Æ 80 * 10 mm
- UHV compatible
- stroke in mm range
- powerless position locking
- high actuator stiffness
- weight 0.2 kg

2 operational modes:

Dynamic positioning
- Planar movement in mm-range
- Dynamic movements in μm-range

Stability
- Planar movement in mm-range
- Stability in nm-range after positioning

Category:

Science & Technology

Tags:

• JPE
• Janssen Precision Engineering
• SetPAC
• Zero Drift Actuator
• piezo actuator
• '3
• DOF
• piezo
• stage
• planar drive
• planar motor
• nanometer positionining
• vacuum compatible
• nanopositioning