High-Speed Overlay Measurement Equipment : DigInfo

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Omron exhibited its High Speed CD/Overlay Measurement Equipment at Finetech Japan 2008. This technology is intended to be used by manufacturers to inspect the wiring of LCD array substrates and the line width and layer deviation of transistors.

The new equipment makes it possible to shorten both lead time and launch time because it can perform high speed measurements, and when the optional film thickness measurement function is added to the equipment, film thickness measurements can be made of microscopic spots with diameters as small as 2.5µm. In addition, it reduces costs and has a smaller footprints due to the integrated functions for line width and film thickness measurements.

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News & Politics

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• computer
• electronics
• mechanics
• High-Speed
• Overlay
• DigInfo
• Omron