Zeromicron® has developed a wide variety of wafer polishing templates, carriers, CMP holders, pad conditioner tools, and various associated accessories. A key element to the patterned Zerommicron® designs is its s3 (Shim Spinning System). This major advancement in wafer polishing technology allows for the water to spin or rotate inside the template cavity or pocket during polishing. This dynamic feature provides for even and consistent polishing across the entire surface of the wafer. Other major advantages of the system are outlined in the "Zeromicron® Advantage" section.
Zeromicron® has developed a wide variety of wafer polishing templates, carriers, CMP holders, pad conditioner tools, and various associated accessories. A key element to the patterned Zerommicron® designs is its s3 (Shim Spinning System). This m...