Featured Playlists
Scanning Electron Microscope
The scanning electron microscope is used to image the surface of a conducting sample by scanning it with a high energy beam of electrons. Some SEMs have additional software enhancements than enable them to focus the beam on a photomask for E-beam lithography or are equipped for focused ion beam (FIB) milling.
CMDITR Retreat 2010
Talks given at the CMDITR Retreat at Pack Forest Conference Center near Seattle, WA between February 16-19, 2010.
Hooked on Photonics
Hooked on Photonics is a 10-week summer research program for undergraduate students, located at University of Washington, University of Arizona, and Georgia Institute of Technology. Apply online by February 15th!
E-Beam Lithography
E-beam lithography is the process of directing an electron beam across a resist layer and thereby creating a pattern that can be etched. Structures of 20nm can be produced. This is the technique that is often used to create nano scale waveguides and microring resonators. One type uses an scanning electron microscope equipped with special beam control software. The other far more expensive method is a dedicated e-beam facility that is able to etch structures directly.
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