Added: 2 years ago
From: acxys
Views: 6,534
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  • Excellent: 5*

    I would like to know the

    homogeniety of the coating?

    Thickness of the deposition?

    What kind of precursors (HMDS) or TMDS etc... anyway I would like to know if the coatings are so defect-free that a leakcurrent of 1nA/10mm2 with 120nm of insulation coating can be obtained!..

    otherwise welldone.

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