Added: 1 year ago
From: jeriellsworth
Views: 6,161
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  • Isn't it almost like a taboo to handle Si wafers using metal tweezers or metal things in general?!

    Nonetheless, I now have an idea of how it should be done.

  • Try that on (111) wafer

  • Where did you get the wafer from.

  • @GalaticTG Ebay and brokers. It's easy to find them.

  • I hope you make a nano/pico lithographic stepper or a molecular beam epitaxy chamber.

  • @TheSolarmike I am actually planning to make a fairly nice set of tools for my lab. Spin coater is already tested and working, next on the list are:

    * CMP system for polishing unpolished wafers / doing damascene patterning

    * Vacuum evaporation chamber for aluminum deposition

    * Laser direct-write lithography system (blu-ray diode + precision steppers)

    * Contact mask aligner / exposure system (405nm H-line or 365nm I-line, both work well with DNQ-novolac photoresists)

  • Oh, and I almost forgot to mention the fume hood and cleanroom-esque glove box. Those might be built as early as this summer.

    I'm hoping to get a serious microfabrication process working in the next year or two. I already have some MEMS designs planned (comb drive is top of the list) that would be very fun to play with :)

  • you put this on vimeo a LOOOONG time ago, didn't you?

  • @thewii552 I did. I wanted to get all the semiconductor videos on youtube also.

  • Mmmm... Cleavage.

  • @Kevbo4 The best kind

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